JPS6347808Y2 - - Google Patents
Info
- Publication number
- JPS6347808Y2 JPS6347808Y2 JP17035883U JP17035883U JPS6347808Y2 JP S6347808 Y2 JPS6347808 Y2 JP S6347808Y2 JP 17035883 U JP17035883 U JP 17035883U JP 17035883 U JP17035883 U JP 17035883U JP S6347808 Y2 JPS6347808 Y2 JP S6347808Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- casing
- temperature
- control device
- humidity control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 26
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000005192 partition Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 5
- 238000009423 ventilation Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17035883U JPS6077951U (ja) | 1983-11-01 | 1983-11-01 | 空気清浄ユニツト用温湿度制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17035883U JPS6077951U (ja) | 1983-11-01 | 1983-11-01 | 空気清浄ユニツト用温湿度制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6077951U JPS6077951U (ja) | 1985-05-31 |
| JPS6347808Y2 true JPS6347808Y2 (en]) | 1988-12-09 |
Family
ID=30371929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17035883U Granted JPS6077951U (ja) | 1983-11-01 | 1983-11-01 | 空気清浄ユニツト用温湿度制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6077951U (en]) |
-
1983
- 1983-11-01 JP JP17035883U patent/JPS6077951U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6077951U (ja) | 1985-05-31 |
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